ST FilesNo : ST[]

 

Product number :
  • ST-5 A3
  • ST-5 A4
  • ST-5 B4
  • ST-5 B5

    Product guidance and an explanatory note :

  • Using as the file in the clean room, Assemble line.
  • The surface resistance value: under 1×107Ω/□.
  • The beam transmissivity: 30%(550nm).

    Code number :
  • 715-7360
  • 715-7361
  • 715-7362
  • 715-7363

    • Product number Code number Size Shipment Unit
    ST-5 A3 715-7360 A3 1box(100sheets)
    ST-5 A4 715-7361 A4 1box(100sheets)
    ST-5 B4 715-7362 B4 1box(100sheets)
    ST-5 B5 715-7363 B5 1box(100sheets)

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